Investigation of Hydrophilic Properties of TiOx and TiOxNy Thin Films Deposited by Radio-frequency Reactive Magnetron Sputtering
碩士 === 逢甲大學 === 材料科學所 === 96 === Mixtures of argon and oxygen, excited by a radio-frequency generator, in an ultra-high-vacuum magnetron sputtering system, were used to bombard a metallic titanium target, and the transition from metallic to poisoned deposition modes induced by gradually varying the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43009345282020664851 |