| Summary: | 碩士 === 逢甲大學 === 自動控制工程所 === 96 === An improved process has been developed for the efficient fabrication of a microlens array with high fill factor and controllable configuration. The microlens mold for patterning transformation was fabricated using the processes of glass wet etching, nickel electroplating, photoresist spin coating and an encapsulated air heating. The convex microlens shape resulted from the photoresist compressed by the thermal expansion of sealed air to form a semi-spherical shell. By adjusting the heating temperature and the sealed air volume, the curvature and size of the shell are controllable. In addition, the microlens mold or plano-convex micromirror can be fabricated by depositing a metal film on the surface profile of swelled photoresist. An analytical model was established to predict the surface profile of a single microlens and experimentally verified. A typical microlens mold made from nickel with different fill factors and various configurations was also fabricated and characterized. The polysiloxine microlens array was also fabricated by mold pressuring and its optical properties were measured to identify the focusing capability. Experimental results reveal that various configurations of microlens array could be formed, such as semi-elliptical and M-character, by defining the pitch of via-holes. High fill factors, approaching 100%, can also be achieved. The measured mean square surface roughness of the nickel mold is less than 3.5 nm, which is an excellent surface property for optical applications. The proposed fabrication provides an effective way to manufacture a microlens mold to serve as the master element for replication. Moreover, the distribution of projected light intensity for a high fill factor microlens array diffuse light emitting diode backlight source was measured. The experiment results shown the microlens array element is able to improve the brightness and high uniformity of the direct light emitting diode backlight units.
|
|---|
