Design and Fabrication of Microfluid Logic Devices for Executing Combinational Logic Functions

• Main Authors: Hsueh-yu Hung, 洪學佑
• Other Authors: Hsing-Cheng Chang
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/95088695166253464249

碩士 === 逢甲大學 === 自動控制工程所 === 96 === The goal of this research is to improve microfluidic logic devices that were previous developed in our Lab. To improve dynamic performance of microdevices can supply in multi-stage cascaded configuration to perform combinational logic functions. Thus, it is proposed to realize microfluidic logic device to perform desired combinational logic function. The ANSYS, a finite element analysis software, is used to simulate design parameters. The optimal dynamic performances of devices are also done by simulation. MEMS compatible technology is used to fabricate devices with analyzing design rule and error analysis. The functional measurement system is setup for measuring transient and steady responses by using multi-functional MCU to control solenoid valves, which controls pneumatic input signals; to measure pneumatic output signal, and to obtain dynamic response characteristics of microfluidic logic device. To verify logic behaviors, an interface is designed to control valves for supplying sequential pneumatic inputs and to compare output values with theoretical values for various combinational logic functions. The developed low cost dynamic measurement system is demonstrated accurately that could be assembled as a pneumatic control logic system combined with microfluidic logic device. And, it could be applied as a precision mechatronic system for industrial safety, and medical inspection applications.