Study on Multi-Axis Measurement of Two-Wavelength Laser Interferometer
碩士 === 清雲科技大學 === 機械工程研究所 === 96 === This study describes about the development of a multi-degrees-of-freedom motion error measurement system for micro-scale machine tools based on the characteristics of micro-scale dimension. A compact measurement module for motion position measurement has been fab...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33581235879114263950 |
| Summary: | 碩士 === 清雲科技大學 === 機械工程研究所 === 96 === This study describes about the development of a multi-degrees-of-freedom motion error measurement system for micro-scale machine tools based on the characteristics of micro-scale dimension.
A compact measurement module for motion position measurement has been fabricated using a two-frequency He-Ne laser head as the light source combined with some optical components and sensors. The size of the interference module is approximately (21mm × 21mm × 5mm) and can be placed near the machining stage. The measurement core is a (5mm × 5mm × 5mm) mirror cube. The optical path is designed to simultaneously measure six signals reflected from the two orthogonal surfaces of the cube. This offers simultaneous measurement of five-degrees-of-freedom motion status of the machining stage. With the help of this module, the development of a micro-scale machine tool error measurement and calibration system can be expected. The experimental results show that the measurement range of the system is 1 mm for position and 1.43 ° for angular.
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