Study on Multi-Axis Measurement of Two-Wavelength Laser Interferometer
碩士 === 清雲科技大學 === 機械工程研究所 === 96 === This study describes about the development of a multi-degrees-of-freedom motion error measurement system for micro-scale machine tools based on the characteristics of micro-scale dimension. A compact measurement module for motion position measurement has been fab...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33581235879114263950 |