Nano-machining in a Scanning Electron Microscope by Run-to-Run Control Based on Image Feedback
碩士 === 中原大學 === 機械工程研究所 === 96 === The purpose of this research is to perform nano-machine in a scanning electron microscope (SEM) via the run-to-run control and digital image feedbacks. The digital images are obtained by using the wavelet transform and binarization in order to recognize and feedba...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95926541815777953038 |