A Study on the Design Principles of the Etching Chemical Concentration Analyzer for TFT-LCD Panel

• Main Authors: Chih-Wei Yu, 尤志偉
• Other Authors: Jin-Maun Ho
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/59325992932789489212

碩士 === 中原大學 === 電機工程研究所 === 96 === Following the semiconductor industry, the monitor industry has become one of the most important industties. TFT displays have replaced the CRT (Cathode Ray Tube) displays and become mainstream.But it needs a large investment to develop the TFT industry.When the size of glass becomes larger,how to make cost down is getting more important. In the processes of display manufacture ,etching is a very important step. For successful etching, the monitoring of concentration of etching liquid is the key factor.Therefore, the concentration meter plays a main role in the display manufacture.There are two types of concentration meters, one depends on the conductivity of liquid, another depends on the speed of supersonic wave in the liquid. This report will introduce etching process,principles of the concentration measuring, and measuring tools.