Study on the structure and gas separationperformance of HMDSO/MCE plasmadeposited membrane
碩士 === 中原大學 === 化學工程研究所 === 96 === In this study, SiOxCyHz/Mixed cellulose esters (MCE) plasma deposited membranes were fabricated by hexamethyldisiloxane (HMDSO) plasma enhanced chemical vapor deposition (PECVD) on the MCE, which has some advantages, e.g., monomer doesn’t have double bond and depos...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39131558923902455255 |