Polyoxide and Thin Film Transistor Fabricated by MILC and CF4 Plasma
碩士 === 長庚大學 === 電子工程學研究所 === 96 === In LTPS TFTs research, the quality of Polycrystalline silicon is a popular topic to investigate, but it has drawbacks in Polycrystalline silicon, such as interface roughness, interface trap states, and grain boundary trap states. We propose a simple fluorinating t...
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| Format: | Others |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86965568046040508210 |