Preparation and Application of Sub-micron Lead Zirconium Titanate Surface Acoustic Wave Biosensors

Preparation and Application of Sub-micron Lead Zirconium Titanate Surface Acoustic Wave Biosensors

碩士 === 長庚大學 === 化工與材料工程研究所 === 96 === The objectives of this research are to prepare piezoelectric lead zirconium titanate (PZT) films by micro-powder sol-gel method, to fabricate surface acoustic wave (SAW) devices with sub-micron inter-digital (IDT) electrodes by utilizing semiconductor process te...

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Bibliographic Details
Main Authors:	Hsin Chieh Yang, 楊欣潔
Other Authors:	H. C. Lu
Format:	Others
Published:	2008
Online Access:	http://ndltd.ncl.edu.tw/handle/59221670662891800924

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