| Summary: | 碩士 === 長庚大學 === 化工與材料工程研究所 === 96 === The objectives of this research are to prepare piezoelectric lead zirconium titanate (PZT) films by micro-powder sol-gel method, to fabricate surface acoustic wave (SAW) devices with sub-micron inter-digital (IDT) electrodes by utilizing semiconductor process technologies including I-line stepper and wet etching, and to apply these SAW devices as biosensors to detect human IgG. In addition, the bio-sensing performance of these PZT SAW biosensors is compared with that of quartz crystal microbalance (QCM) under the same immobilization and sensing conditions.
From the experimental results, it was found that PZT films prepared from the precursor slurry solutions made from PZT micro-powders calcined at 550°C for 90 minutes have best electrical properties (Pr=29.3 μC/cm2, εr=1889.355, d31=-418.580 pC/N, d33=916.681 pC/N at 1kHz) after being soft-baked at 250°C for 10 minutes and hard-baked at 600°C for 1 hour. The central frequency and the insertion loss of PZT SAW devices prepared from PZT films mentioned above are 2299 MHz and 16.139 dB, respectively. When used for the actual detection of human IgG, the detection of limit of PZT SAW biosensors is 10-9 g / ml and is better than that of the QCM biosensors (10-7 g/ml) under the same immobilization and sensing conditions.
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