Design and Implementation of CMOS Sigma-Delta Force-Balance Microaccelerometers

• Main Authors: Yu-Chieh Hsu, 許裕傑
• Other Authors: Shuenn-Yuh Lee
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/62205063954741226962

碩士 === 國立中正大學 === 電機工程所 === 96 === In recent years, the Microelectromechanical System(MEMS) has been widely used, especially in vehicle security system, inertia, and the consuming electronic product. The integration of sensor device and interface circuits in the single substrate is the main bottleneck in this system. In this thesis, the systematic design and implementation of the open-loop monolithic microaccelerometer are presented.This chip is implemented in TSMC 0.35μm 2P4M CMOS process. Closed-loop system have higher reliability and the ΣΔ modulator can reduce the usage and cost of the circuit’s component. By design experience of open-loop monolithic microaccelerometers, the analysis and simulation of the close-loop is also presented, and the non-ideal effects of the electromechanical ΣΔ modulator have been concerned for the circuit design. By this way, the specification of the circuits has been decided and the simulation results has been demonstrated. The circuits simulation result has been verified, so the closed-loop system can carry out.