Laser Patterning of ITO on hard/flexible substrates using Pico-second and Nano-second Lasers

• Main Authors: Hui-Hsien Chen, 陳輝憲
• Other Authors: J. S. Chen
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/13005382915516523403

碩士 === 國立中正大學 === 機械工程所 === 96 === In this article, we present the technique of thermal treatment of pico-second (10x10-12s) laser and nano-second (30x10-9s) laser to pattern polycrystalline indium tin oxide (p-ITO) from amorphous indium tin oxide (a-ITO). The micro-structure can be formed successfully by chemical etching for the purpose of solar cell and FPD industry. ITO with good conductivity and high transmittance in visible light region is widely used as photo-electric material and thermal treatment of ITO can enhance conductivity and transmittance. However, thermal treatment of laser has advantages of micro-area and free path. The laser was used as the light source with different pulse duration, energy density and spot overlapping rate etc. By using OM, SEM and AFM, we can analyze the conductivity and transmittance of ITO in optimized condition of laser thermal treatment. In the sample of ITO on glass substrate, it was observed micro-structure with line-width of 20μm and 5μm in treatment of ns laser and ps laser. The electric resistance measurements was changed from high, 1.5x10-3Ω-cm, to low, 1.5x10-4~6.48x10-5Ω-cm. The transmittance test showed about 8% increase in visible light region. In the sample of ITO on PET substrate, the mirco-structure was not successfully formed because shear force occurred in the interface between ITO and PET. Finally, we suggest that laser treatment with feto-second (10-15s) and buffer layer will form fine p-ITO on PET substrate.