The Molecular Dynamics Study on Crack Propagation and Deformation Mechanism of Nanofilm
碩士 === 國立中正大學 === 機械工程所 === 96 === Single crystalline thin films are widely used in the electronic industries, e.g. semiconductor devices and micro-electro-mechanical systems. In the application, the fracture or failure properties of the film are crucial to the quality of the devices or systems. Thu...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75186818293954511227 |