| Summary: | 碩士 === 元智大學 === 電機工程學系 === 95 === The static electricity generated during the rubbing process is one of the serious side effects in the cell manufacture process of 3G TFT-LCD panel manufacturing. Although the static electricity had been overcome by the designed circuit and the antistatic device, however, for the vigorous business competition, raising the productivity and inhibiting the generation of static electricity are two important topics in this arena.
In this thesis, we focused on the research of shortening the tact time on glass substrate and suppressing the static electricity generated during the rubbing process. First, by means of optimizing the processing parameters of Lift Pin in the rubbing process stage, the tact time could be shorten and the static electricity could be inhibited as well. In our research, the goal of shortening the tack time to 40 seconds was reached with the optimized combination parameters of Lift Pin (2 seconds was saved.). The maximum static electricity value could be controlled less than -2Kv (The criteria was less than -5Kv.). Second, in the research of inhibiting the static electricity generation during the rubbing process, we found that the static electricity could be reduced by means of controlling the humidity. When the humidity was set at 70%, the static electricity was less than -1Kv. Even the test was implemented with the fastest processing condition, the static electricity could be controlled to less than -3Kv.
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