| Summary: | 碩士 === 國立雲林科技大學 === 電子與資訊工程研究所 === 95 === In this study, we mainly explored the synthesis of zinc oxide nanostructure and the
application of its properties. Zinc oxide nanostructure was made from p-type silicon
wafer, alumina, and ITO glass and so on. There were two kinds of catalyst in the
synthesis method: one was Au layer as a catalyst and was deposited by DC sputtering
system; another was ZnO thin film as a catalyst and deposited by RF sputtering system.
Then, it was to cooperate different precursor such as zinc powder and ZnO powder mix
with gah powder and to take advantage of thermal CVD to make the development of
nanostructure.
The material of this experiment was to control different process parameter such as
nano rod, nano stitch, nano flake etc. So to take advantage of different properties can
make several application, and can be applied to UV detector, biochemical sensor and
dye-sensitized cell.
To use scanning electonmicroscore (SEM) and X-Ray diffraction (XRD) and to
analyse the synthesis of ZnO nanostructure and then we can use the result to make
different changing parameter.
Finally, in this study we also used these different structures to carry out the measure
analysis of physical property and electrical property and measured field emission and
sensed UV light. Moreover, we can compare with the different structure with different
properties.
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