Using Sol-gel method to fabricate Barium Strontium Titanate thin film for the MIS capacitor of high dielectric and the gate insulator of OTFTs
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所 === 95 === In this thesis divided into two gradation. First, using Sol-gel method to prepare the solution of Barium Strontium Titanate (BaXSr1-XTiO3，BST) and to deposite on n-type Silicon substrate to form high dielectric thin film by using spin coating technique. The...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33023998053164102701 |