Preparation and Characterization of Lanthanum Gallium Silicate Thin Films
博士 === 大同大學 === 材料工程學系(所) === 95 === La3Ga5SiO14 (LGS) has high potential in applications as a new non-ferroelectric, piezoelectric material with high electromechanical coupling factor and almost zero temperature coefficient of delay (TCD). In this study, LGS thin films are prepared by RF sputterin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4t5zs8 |