Surface Immobilization of Biomolecules onto Plasma Treated and Surface Grafted Acrylamide for Humidity sensors

• Main Authors: Yu-chieh Tu, 涂煜杰
• Other Authors: Ko-Shao Chen
• Format: Others
• Language: en_US
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/vytzhg

碩士 === 大同大學 === 材料工程學系(所) === 95 === The plasma deposition and surface grafting polymerization have been used to gradually formed the organic layers on inorganic substrates such as interdigital electrodes devices for single strand DNA immobilization. In this study, the semiconductive tin oxide (SnOX) organic-like thin films were deposited by PECVD of TMT and O2 mixtures on the comb-shaped electrodes as the humidity sensor devices. To improve the sensitivity and stability for humidity sensing, the surface of the deposited flims was subsequently grafted with AAm (acrylamide). Hence, GA as cross-linking reagent to chemical bonding NH2-oligonucleotide probes on the surface of interdigital electrodes. As the surface of sensitive electrodes was immobilized the single strand DNA fragment of Vibrio parahaemolyticus or antibody, ionic molecules, etc. The grafted ionic molecules film enhances the impedance variations with humidity. When surface immobilization of antigen, the results appear the best sensitive range for humidity is R.H. 35∼95％, and the impedance variations decreases by over 5 orders of magnitude from 107 to 102 W .