Study of Si and Si-O Films on the Surface of IF Steel as the Thermal Diffusion Barrier

• Main Authors: Chih- hao Lai, 賴志豪
• Other Authors: Tair-I Wu
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/kt8f46

碩士 === 大同大學 === 材料工程學系(所) === 95 === Surface modified layer of TiO2 with anatase phase can’t be obtained from direct spin-coated TIP on IF (interstitial free) steel by using sol-gel techniques. Thus, Si and Si-O films were sputtered on IF (interstitials free) steel sheet specimens by DC magnetron controlled technique in this study to see the effect of protective films on retarding the diffusion of ferrite atoms during heat treatment. Then we utilize optical lithography and ICP-RIE system to make Fe/Si film into TiO2 -Fe2O3 composite coatings. Finally We use spin-coated method with TIP gel drop down on Fe/Si film surface to obtain TiO2-Fe2O3 composite coatings after calcined. The influences of sputtering pressure, gas mixture, working voltage and operating period on the performance of the Si, Si-O films and TiO2-Fe2O3 composite coatings made in different etching time to act as a diffusion barrier under certain conditions were investigated. Surface morphological, structural and compositional variations were analyzed by employing scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), X-ray diffractometry (XRD), Raman spectroscopy, glow discharge optical spectrometry (GDOS), X-ray photoelectron spectroscopy (XPS) and UV-Vis spectroscopy (UV-Vis). Thermal stability of the sputtered films remained unchanged after heat treated at 400℃ for 1hr twice and 700℃ for 1hr. The Si and Si-O films effectively inhibited the diffusion of ferrite atoms and oxidation of iron substrate, so that we obtain TiO2-Fe2O3 composite coatings with high TiO2 adhesion and super hydrophilicity.