Preparation of Highly C-axis Oriented PZT Films on Si Substrate by Sol-Gel Method with MgO Buffer Layer and Their Surface Acoustic Wave Applications
碩士 === 大同大學 === 光電工程研究所 === 95 === Lead zirconate titanate (Pb(Zr,Ti)O3, PZT) thin films have received much attention due to their excellent dielectric, ferroelectric and piezoelectric properties. Epitaxial growth of PZT films on Si substrate is desirable to integrate ferroelectric devices and semic...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21974509418788824664 |