Design and Fabrication of the Diaphragm-Type Micro Pressure Sensors and Thermal Buckled Actuators
博士 === 淡江大學 === 機械與機電工程學系博士班 === 95 === Diaphragm-type structure is the most important configuration applied in the MEMS device. In this thesis, the mechanical and thermal-mechanical performances of the diaphragm structures are discussed. Some analytic and numerical solutions of the deformation equa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08229707149209248598 |