A Study of Microwave Plasma System Electromagnetic Fields Simulation
碩士 === 國立臺北科技大學 === 機電整合研究所 === 95 === Plasma technology is the key technology of high –Tech industry, it play very important role in different areas , like diamond films, semi-conductor, and nano material, etc. Microwave plasma is the important factor of plasma operation, thin film growth rate and...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87e8vk |