A study of the relationship between diamond film synthesis and electric field of MPCVD using simulation approach
碩士 === 國立臺北科技大學 === 製造科技研究所 === 95 === This research is based on microwave plasma CVD deposition to adjust different resonance cavities by using tuner. In order to find the opposable position between substrate and the center of plasma, we fixed the power at 800 Watt and the working pressure at 45 To...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pam83q |