Effects of Processing Parameters on the MgTiO3 Dielectric Ceramic Films Prepared by Aerosol Deposition Method

Effects of Processing Parameters on the MgTiO3 Dielectric Ceramic Films Prepared by Aerosol Deposition Method

碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 95 === The aerosol deposition method(ADM) is a unique technology that enables to deposit MgTiO3 thick film on the Pt/Ti/Si substrate at room temperature. The efficiency of this method is high and the 2-dimensional pattern can be established directly. Through the co...

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Bibliographic Details
Main Authors:	Li-Gia Teng, 鄧力嘉
Other Authors:	Yu-Chuan Wu
Format:	Others
Language:	zh-TW
Published:	2007
Online Access:	http://ndltd.ncl.edu.tw/handle/j737y9

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