Effects of Processing Parameters on the MgTiO3 Dielectric Ceramic Films Prepared by Aerosol Deposition Method
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 95 === The aerosol deposition method(ADM) is a unique technology that enables to deposit MgTiO3 thick film on the Pt/Ti/Si substrate at room temperature. The efficiency of this method is high and the 2-dimensional pattern can be established directly. Through the co...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/j737y9 |