Implementation of nano-polymer grating component through blue light laser

• Main Authors: Chiung-Cheng Wang, 王烱程
• Other Authors: Wen-Chung Chang
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/67961445400227239138

碩士 === 南台科技大學 === 電子工程系 === 95 === In this research, it composed of photolithography and soft molding to create a novel fabrication technology. And then it associated with holographic interference lithography to produce a Nano-polymer Bragg grating component. In this fabrication, we primarily utilize blue light laser and He-Cd laser along with the photolithography and holographic interference lithography to produce diffraction grating components. Moreover, the formed diffraction grating component would combine with micro-contact printing of non-photolithographic, micro-molding in capillaries and replica molding to fabricate the molding of a polymer grating component. In the research, we measured and recorded the experiment results of polymer OG grating molding by AFM. The optical characteristics of grating are measured by blue light laser and He-Cd laser. The highest diffraction efficiency of blue light laser in single side of the first order has achieved 2%. The highest diffraction efficiency of He-Cd laser in single side of the first order has achieved 10%. Both of them inferred transmission rate of component are already reached 98%.