The silicon-based etching mechanism and analysis on material properties
碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 95 === In this thesis, the porous silicon (PS) films are fabricated by electrochemical anodization method. Various experimental parameters, such as etching current density, etching time and HF concentration, are investigated. Porous has been extensive researched, b...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/49861716966531532728 |