SPECIAL THIN FILM DESIGN AND MANUFACTURE FOR IR CUT FILTER OF AMBIENT SENSOR

• Main Authors: Tzu-Min Lin, 林子閔
• Other Authors: FUH-SHYANG JUANG
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/dxe9qr

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 95 === Abstract The optical thin film means to plate on the optical component or the independent board previous or multi-layer film that the quality thin file contstitutes to push to change delivering of light wave characteristic . Therefore can makeuse of the way of optical thin film to change the characteristic that the optical component needs ， as increment it is thus clear that bare of deeply closing of light rate，infrared wave band etc . Present light give or get an electric shock an industry booming development，particularil is valued more in the sensor ， due to manufacturer to cent light the characteristic values very much ， therefore cent light characteristic of development competition also the most vigorious . Commercialize currently of chine on one degree sensor ， its cent light characteristic Feng values is about 550~560 and rather near seeing of person`s eye feeling Feng value . Thisesis research is the way that makes use of physics to became a film to become on the sensor special of infrared close a eave-length ， makes the effect that the optical thin film produces let sensor for cent light characteristic Feng value fall or so near the mankind`s vision more to respond in the 550~580 ， reach better effect . Be to use Ti3O5 and SiO2 in this research process ， Two kinds of materials make use of TFCalc software again to do several film designs ， reach special of infrared ray close filter light thin film . Close at the traditional infrared ray to filter the membrane and special infrared ray to close at and filter the membrane to plate in the silicon only measure the base plate brilliantly and comparing separately in the experiment , the response spectrum peak value received to find the traditional type left 615nm finally, and the figure of the spectrum gradient was comparatively unequal, can''t imitate the vision characteristic of the human eye , but the response spectrum peak value that the special type gets is 560nm, and it is extremely close that spectrum figure and standard human eye photopic which International Commission on Illumination make respond function.