Development of a 2-axes Closed-Loop Short Travel Micro/Nano-Positioning System Integrated with 2 Optical Fiber Interferometer Systems
碩士 === 國立臺灣科技大學 === 機械工程系 === 95 === The objective of this research is to develop a PC-based closed loop short travel X-Y axes micro-/nano-positioning system. The developed system mainly consists of two piezoelectric actuators, two displacement enlarged mechanisms, a micro-/nano-positioning stage an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tzh4g4 |