Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells
碩士 === 國立臺灣科技大學 === 電子工程系 === 95 === In this research,we discuss the Excimer Laser Crystallization of thick Si films, and we manufacture the Poly-Si Thin-Film Solar Cells by this film. In the research, we can find the crystallization by Excimer laser of 700nm Si film.And the complete melting charac...
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52181849041177373666 |
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ndltd-TW-095NTUS54281302015-12-07T04:04:30Z http://ndltd.ncl.edu.tw/handle/52181849041177373666 Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells 矽厚膜之準分子雷射結晶化與其在薄膜太陽能電池之應用 Chien-Chou Chen 陳建州 碩士 國立臺灣科技大學 電子工程系 95 In this research,we discuss the Excimer Laser Crystallization of thick Si films, and we manufacture the Poly-Si Thin-Film Solar Cells by this film. In the research, we can find the crystallization by Excimer laser of 700nm Si film.And the complete melting characteristic is Disc grain. We can produce lateral growth length about 7um by SLS.Finally we use this film to manufacture P+ P N diode. n =3.37 , ON/OFF=20. Wen-chang Yeh 葉文昌 2007 學位論文 ; thesis 57 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
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碩士 === 國立臺灣科技大學 === 電子工程系 === 95 === In this research,we discuss the Excimer Laser Crystallization of thick Si films, and we manufacture the Poly-Si Thin-Film Solar Cells by this film. In the research, we can find the crystallization by Excimer laser
of 700nm Si film.And the complete melting characteristic is Disc grain.
We can produce lateral growth length about 7um by SLS.Finally we use this film to manufacture P+ P N diode. n =3.37 , ON/OFF=20.
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| author2 |
Wen-chang Yeh |
| author_facet |
Wen-chang Yeh Chien-Chou Chen 陳建州 |
| author |
Chien-Chou Chen 陳建州 |
| spellingShingle |
Chien-Chou Chen 陳建州 Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells |
| author_sort |
Chien-Chou Chen |
| title |
Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells |
| title_short |
Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells |
| title_full |
Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells |
| title_fullStr |
Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells |
| title_full_unstemmed |
Excimer Laser Crystallization of Thick Si Films and Its Application to Poly-Si Thin-Film Solar Cells |
| title_sort |
excimer laser crystallization of thick si films and its application to poly-si thin-film solar cells |
| publishDate |
2007 |
| url |
http://ndltd.ncl.edu.tw/handle/52181849041177373666 |
| work_keys_str_mv |
AT chienchouchen excimerlasercrystallizationofthicksifilmsanditsapplicationtopolysithinfilmsolarcells AT chénjiànzhōu excimerlasercrystallizationofthicksifilmsanditsapplicationtopolysithinfilmsolarcells AT chienchouchen xìhòumózhīzhǔnfēnziléishèjiéjīnghuàyǔqízàibáomótàiyángnéngdiànchízhīyīngyòng AT chénjiànzhōu xìhòumózhīzhǔnfēnziléishèjiéjīnghuàyǔqízàibáomótàiyángnéngdiànchízhīyīngyòng |
| _version_ |
1718146692261347328 |