| Summary: | 碩士 === 國立臺灣科技大學 === 材料科技研究所 === 95 === We report a detailed study of growth of nanostructural iridium dioxide (IrO2) with modified cold-wall metal organic chemical vapor deposition (MOCVD) systems using (C6H7)(C8H12)Ir and (C5H7O2)(C8H12)Ir as the source reagents. The MOCVD systems were modified by increasing the numbers and decreasing size of holes for O2 ring and showerhead. Using these newly modified MOCVD systems, self-assembled one-dimensional (1-D) IrO2 nanocrystals (NCs) of various geometry including rods, tubes, triangles, tubular scroll and flower-like, as well as thin films have been successfully deposited on SA(100) and SA(012) substrates, under different conditions, with a better uniformity and reproducibility. A detailed characterization focusing on the morphology, structures and orientation of the various IrO2 NCs have been carried out by means of field-emission scanning electron microscopy, X-ray diffractometer (XRD), X-ray photoelectron spectroscopy (XPS) and Raman scattering measurements. The XRD results indicate that the NCs are (001) and (101) orientation on SA(100) and SA(012) substrates, respectively. The XPS results show the ideal ratio of Ir and O is 32：68. The red shifts of the peak positions and broadening of the linewidths of the Raman features from nanostructural IrO2 can be attributed to both the size and residual stress effects.
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