Comparison of one dimensional IrO2 nanocrystals deposited with (C5H7O2)(C8H10)Ir and (C6H7)(C8H12)Ir via MOCVD
碩士 === 國立臺灣科技大學 === 材料科技研究所 === 95 === We report a detailed study of growth of nanostructural iridium dioxide (IrO2) with modified cold-wall metal organic chemical vapor deposition (MOCVD) systems using (C6H7)(C8H12)Ir and (C5H7O2)(C8H12)Ir as the source reagents. The MOCVD systems were modified by...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/4s5cw4 |