| Summary: | 碩士 === 臺灣大學 === 機械工程學研究所 === 95 === In this paper, the fabrication and characterization of thermopneumatic peristaltic micropumps are presented. The working principle of the micropumps is derived, and the relationship of the driving voltage and the deflection of the PDMS membrane is obtained. By using soft lithography technique, the SU-8 molds of the component of the micropumps are fabricated. Then, PDMS replicate are fabricated using the SU-8 molds. Micropumps with three different configurations are fabricated. These three configurations are composed of 3, 5 and 7 serial peristaltic structures, respectively. In order to study the effects of number of the peristaltic structures on the performances of the micropumps, we measure the flow rates and the maximum back pressures for the micropumps operating at different driving frequency. The experiment results show that the maximum flow rate of these three types of micropumps occurs at the driving frequency of 2 Hz. The maximum flow rates for the micropumps with 3, 5 and 7 serial peristaltic structures are 1.16, 1.15 and 1.25
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