The Development of High Stability Temperature Environment
碩士 === 國立臺灣大學 === 機械工程學研究所 === 95 === In the progress of micro/nano technology, many miniature parts with ultrahigh precision requirement are produced; therefore the high precision temperature control is very important in the modern precision measurement system. If the measurement is proceed in a en...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/95384283262928532671 |