The Development of High Stability Temperature Environment

• Main Authors: Wang, Hsiang-Ming, 王祥名
• Other Authors: 范光照
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/95384283262928532671

碩士 === 國立臺灣大學 === 機械工程學研究所 === 95 === In the progress of micro/nano technology, many miniature parts with ultrahigh precision requirement are produced; therefore the high precision temperature control is very important in the modern precision measurement system. If the measurement is proceed in a environment which vary widely in temperature, the measurement error will be large. In order to minimize these environment errors, this research develops a high stability temperature environment chamber. In this report, we propose to build a high stability environment chamber. Outside the chamber temperature is controlled by the air conditioning. The environment chamber uses the electric current to control a thermoelectric cooling chip. The separation design of chamber and cooling system is able to reduce the vibration. The system identification employed Rake’s system identification method to obtain the system model so that the suitable PID parameters could be acquired through simulation of Matlab Simulink . The temperature controlling program is accomplished with electrical cuircuit , LabVIEW, and Data Acquisition (DAQ) cards produced by National Instrument. The results showed that the temperature can be controlled at the set point and the temperature vibration within 20 degree up and down 0.008℃ in the steady state. It can achieve the goal of high stability temperature environment. Keywords: thermoelectric cooling chip , Rake’s system identification method, separation design、LabVIEW、Matlab Simulink