The Study of anomalous Infrared Transmittance of Metallic Gratings with Various Thickness
碩士 === 國立臺灣大學 === 電機工程學研究所 === 95 === The optical properties of periodical structure have been studied for a long time. The reason to anomaly of transmission spectrum was not well-discovered. For polarized incident light, the electromagnetic wave excited around one-dimensional metallic grating is mo...
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/92524064050190855138 |
Summary: | 碩士 === 國立臺灣大學 === 電機工程學研究所 === 95 === The optical properties of periodical structure have been studied for a long time. The reason to anomaly of transmission spectrum was not well-discovered. For polarized incident light, the electromagnetic wave excited around one-dimensional metallic grating is more complicated than two-dimensional structure.
In the thesis, we took usage of e-beam lithography system and two kinds of photoresist to define the pattern of grating. The undercut structure was fabricated with wet etching and the metallic grating was deposited with evaporation. The incident light was polarized in TE and TM modes, and the transmission spectrum of sample was measured by Fourier transform infrared spectrometer. We analyzed rising and descending trends of wave in the spectrum and tried to explain the underlying physics of extraordinary transmission points.
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