Fabrication and analysis of MEMS resonator
碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 95 === In this thesis, the Film Bulk Acoustic Resonator (FBAR) has been fabricated by stacking various layers of Al/ZnO/Al/Si3N4 on a silicon substrate (100). The low-stress silicon nitride films were deposited on both side of the substrate by Low-pressure chemica...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79700920751336926706 |