Fabrication of Diamond Nano-Tip Array by Template of Porous Anodic Alumina

• Main Authors: Jhih-Hong Chen, 陳智鴻
• Other Authors: Hung-Yin Tsai
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/38112292481524668682

碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 95 === Diamond nano-tip arrays were fabricated on porous anodic alumina (PPA) by hot-filament chemical vapor deposition (HFCVD). Prior to CVD method, nano diamond particles were deposited on the PAA substrate by electrophoretic deposition to improve the possibility of growth. The morphology and purity of diamond tips were examined by scanning electron microscopy (SEM) and micro-Raman spectroscopy, respectively. The effect of CH4/H2 and pressure at the growth process of diamond nano-tip arrays have been investigated and the optimal condition was 2 % CH4/H2 and 80 Torr. The diamond nano-tip arrays were fabricated at different ranges of the substrate temperature (560℃-760℃), but the height of the diamond nano-tip did not change obviously. Finally, the diamond nano-tip arrays were firstly fabricated on the PAA substrate and the diameter of the diamond nano-tip was about 30 nm.