A Study on Property Improvements of Sputtered Copper Films Using Glass-Forming Film and Oxide
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 95 === In this study, sputtered Cu film properties have been improved using a glass-forming (Zr45.7Cu32.2Al14.3Ni7.8) as the barrier layer and doping with small amounts of oxygen. For this Zr-based film alone (hereafter called the Zr layer), it shows nanocrystalline s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04724297276028792391 |