Investigation of the formation of titanium silicide nanostructures on silicon

Investigation of the formation of titanium silicide nanostructures on silicon

博士 === 國立清華大學 === 材料科學工程學系 === 95 === The growth mechanism and morphology of titanium silicide nanostructures on Si substrate have been investigated by scanning tunneling microscope (STM), atomic force microscope (AFM), transmission electron microscope (TEM), and in situ ultrahigh-vacuum TEM (UHV-TE...

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Bibliographic Details
Main Authors:	Hsu, Hung-Chang, 許宏彰
Other Authors:	Chen, Lih-Juann
Format:	Others
Language:	en_US
Published:	2007
Online Access:	http://ndltd.ncl.edu.tw/handle/57570972460941987055

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