Determination of trace contamination in Si semiconductor : metal impurities in photoresist raw material、environmental ammonia sources in photolithography cleanrooms，and organic contaminants in pad
博士 === 國立清華大學 === 化學系 === 95 === Until recently, there are many product classes of semiconductors, such as MOS memory devices, and the widespread applications include LCD TV, global positioning satellite receive et al. Based on economic benefit, circuit geometries continue to shrink from micrometer...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49920778130606654209 |