Development of Fuzzy Monitoring Technology for Abnormal Temperature Detection in Semiconductor Photolithography Process
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 95 === For semiconductor industry, there are several factors influencing the increasing cost, such as complicated Wafer process, expensive raw materials and strict production environment. To improve yield rate and decrease production cost, wafer fabrication factory...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25101308550685701391 |