Study of the Micro Hot-embossing Process for Microlens Fabrication

碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 95 === This paper investigates microlens fabrication using micro hot-embossing process.Under the scaling law effect, both the height and radius of curvature of the microlens produced by micro hot-embossing are in connection with surface tension.When surface tensio...

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Bibliographic Details
Main Authors: Zhong-yue Huang, 黃仲岳
Other Authors: Zhen-rong Li
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/49893160134641369134
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Summary:碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 95 === This paper investigates microlens fabrication using micro hot-embossing process.Under the scaling law effect, both the height and radius of curvature of the microlens produced by micro hot-embossing are in connection with surface tension.When surface tension increases, the microlens height increases but the radius of curvature decreases.In order to understand the effect of surface tension,simulations of hot-embossing microlens are conducted using Marc simulation softwares are performed, and to fabricate a microlens with designated specifications(ie,height,radius of curvature and focal length),Marc simulations adopting the Taguchi method are carried out to obtain the optimal micro hot-embossing parameters and the experimental verification is then provided.In such away,the development time for microlesns fabrication can by highly reduced.