Study of TiN/ZrN multilayer coatings by using the unbalance magnetron sputtering
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 95 === TiN/ZrN multilayer coating has been found to have high hardness, good wear resistance, high chemical stability and thermal stability. In this study, TiN/ZrN nano-scale multilayer coatings were deposited on SKH51 high speed steel substrate by using the D.C....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91841478269049792292 |