| Summary: | 碩士 === 國立高雄海洋科技大學 === 輪機工程研究所 === 95 === In the study,the indium-tin oxide(ITO) films was sputtered on the unheated glass substrate ,and then the titania(TiO2) films which have the different thickness was sputtered on ITO films by twin direct current magnetron sputtering method.The main subject is discussing the changes of properties of TiO2 films which sputtering on ITO films,and these changes can make the composite films having photocatalytic effect under visible light irradiation.In cross-section patterns of electron microscope,we observed that the visible-light-responsive composite film appeared a mixing crystalline layer,we can suppose that the prepared composite films possess absorbing effect in visible light region by UV-Vis spectrometer,we measured the hardness of composite films by nano indenter,and then we got the result that the hardness of the composite film is more soft than pure TiO2,the photocatalytic activity depend on the degradation of methylene blue,hydrophilicity and hydrophobicity measurements and photo-induced current production of hydrogen, in the degradation of methylene blue experiment,it suggested that composite films are not always have excellent photocatalytic activity; in hydrophilicity and hydrophobicity measurements,we can know that the prepared composite films possess the good separation efficiency of electrons and holes,using the composite film which having photocatalytic effect under visible irradiation to conduct photo-induced current production of hydrogen,we observed that the film make the photocurrent. After completing characterization of properties above, The hardness of TiO2/ITO composite film prepared by twin direct current magnetron sputtering method is not only decreased, but also the composite film possesses the photocatalytic effect under visible light irradiation at the same time.The major factor of hardness decreasing and possessing photocatalytic effect under visible light irradiation is the sputtering time, the longer sputtering time would form a mixing crystalline layer in the amorphous region, the mixing crystalline layer enhance the activity of photocatalysis.Besides we supposed that when increasing the sputtering time,it will produce some organics which absorb on the face of crystalline.The absorption on the face would change the attachment mechanism and change the preferred orientation.
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