The studies of Surface reconstruction on the implanted Vicinal Si(111) using Reflective Second Harmonic Generation

碩士 === 國立嘉義大學 === 光電暨固態電子研究所 === 95 === Second harmonic generation (SHG) is used to study the annealing effect on the low-energy implanted vicinal Si (111). The phenomena of impurity diffusion would be observed through the anisotropic contribution of C3V symmetry of surface in the SHG rotational ani...

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Bibliographic Details
Main Authors: Cheng, Ching-Yuen, 鄭淨遠
Other Authors: Lo, Kuang-Yao
Format: Others
Language:en_US
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/22889537840288980348