The Activated Effects of Hydrogen Ions under Microwave Irradiation at Different Temperature Ambiance
碩士 === 國立中央大學 === 材料科學與工程研究所 === 95 === In the fast-changing semiconductor industry, silicon on insulator (SOI) depending on its unique structure solves many crucial issues that devices fabricated by conventional bulk silicon processing usually have some problems such as current leakage and heat gen...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/77058448901128398015 |