The study of PFC reduction by replacing C3F8 substitute with SF6
碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 95 === ABSTRACT In 1980s, scientists proposed that the green house gases could cause global warming and climate change. The global warming phenomena have then attracted more attentions. Due to the booming of the semiconductor industry, wafer fabs were built l...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94897925080463178638 |