The study of carbon nanotubes synthesis in the plug structure
碩士 === 國立交通大學 === 機械工程系所 === 95 === In the recent, how to achieve the development of manufacture using CNTs as interconnection material became an interesting issue. The aim of this thesis is describe the synthesis of carbon nanotubes (CNTs) from the plug. The microwave plasma chemical vapor depositi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57901687636793468290 |